Micromachining is a key technology for MEMS and micro-optical electromechanical systems. Micromachining can be divided into two types: bulk micromachining and surface micromachining. The micro-machining technology refers to the micro-machining of quasi-three-dimensional mechanism of bulk silicon by etching process, which is divided into two key technologies of etching and stopping etching. Surface processing techniques do not etch away most of the silicon material, but instead use different etching and thin film deposition methods on the silicon wafer to form a thinner structure on the silicon surface. The main representative of the etching technology is the sacrificial layer technology (surface micromachining is performed on a silicon micro-matrix, and a three-dimensional micromechanical structure is prepared by multilayer film deposition and pattern processing. The silicon wafer itself is not processed, and the structural part of the device is deposited. The film layer is processed, and the space between the structure and the substrate is subjected to a sacrificial layer technique). The main thin film deposition techniques are evaporation, sputtering, chemical vapor deposition, etc. The main etching methods are selective wet etching and dry plasma etching.
There are 250 MEMS device manufacturers in the world, which are mainly used to meet the needs of their own end consumer electronics products. The field of MEMS applications is very wide, and the size of a single market segment is very narrow. A company can occupy one or two product leading positions in the hundreds of millions of dollars. For example, Texas Instruments dominates the DLP market, HP dominates the printer's inkjet head market, Avago Technologies dominates the filter market, and ADI, ST, Freescale, and Micron occupy the accelerometer market, and Lou's dominates the microphone market. In order to reduce costs and monopolize the market, international companies have increased the construction of 8-inch MEMS production lines. STMicroelectronics upgraded its MEMS line to 8 inches in 2006, and Omron and Freescale began to build 8-inch production lines.
The domestic MEMS processing industry is still in the introduction stage, and Beijing Jade Bird Yuanxin and Wuxi Meixin Semiconductor occupy the leading position. Relying on the Microelectronics Research Institute of Peking University, Jade Bird Yuanxin became the first high-tech enterprise in China to mass produce MEMS micro-sensors, with a monthly production of 100,000 MEMS sensors. Wuxi Meixin Semiconductor is the world's first thermal convection MEMS inertial sensor company using standard CMOS technology and integrated mixed-signal processing on a single chip; design production capacity is 15 million pieces/month, accelerometer products 5 million pieces/month, in Wuxi The second CMOS-MEMS factory has been put into production, producing 10 million accelerometers per month. However, it is undeniable that the average production capacity of domestic MEMS manufacturers is weak, and most of them still use 4 to 5 inches of low-end production lines. Jade Bird Yuanxin used the early purchase of a second-hand production line from Ford to manufacture MEMS sensors.
Wuxi is close to Suzhou and has a Kunshan sensor industry base. As the only national industrial base for producing sensors in China, the base has formed a silicon-resistive MEMS sensor and transmitter with independent intellectual property rights as its core industrial chain. It has 30 sensor manufacturers with a total investment of 1.8 billion yuan. Domestic MEMS pressure sensor leading companies - Shuangqiao Measurement and Control Sensor Co., Ltd. and Minxin (Suzhou) microelectronics companies are among them.
Glossary: ​​MEMS
MEMS is the abbreviation of Micro-Electro-Mechanical Systems. MEMS is the name of the United States. It is called micromechanical in Japan and microsystem in Europe. It refers to mass-produced micro-mechanisms, micro-actuators, micro-actuators, and signal processing and control circuits. , communication and power supply are equal to one micro device or system. MEMS is developed along with the development of micro-machining technology and ultra-precision machining technology for semiconductor integrated circuits. Currently, MEMS processing technology is widely used in microfluidic chips and synthetic biology to conduct biochemistry and other laboratories. Chip integration of technology flows.
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